Effects of Annealing on TiN Thin Film Growth by DC Magnetron Sputtering
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چکیده
منابع مشابه
The Effect of Substrate on Structural and Electrical Properties of Cu3N Thin Film by DC Reactive Magnetron Sputtering
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ژورنال
عنوان ژورنال: Advances in Mechanical Engineering
سال: 2014
ISSN: 1687-8140,1687-8140
DOI: 10.1155/2014/373847